Invention Application
US20130093450A1 VERTICAL PROBE ARRAY ARRANGED TO PROVIDE SPACE TRANSFORMATION 有权
垂直扫描阵列安排空间转换

  • Patent Title: VERTICAL PROBE ARRAY ARRANGED TO PROVIDE SPACE TRANSFORMATION
  • Patent Title (中): 垂直扫描阵列安排空间转换
  • Application No.: US13693971
    Application Date: 2012-12-04
  • Publication No.: US20130093450A1
    Publication Date: 2013-04-18
  • Inventor: January Kister
  • Applicant: FormFactor, Inc.
  • Applicant Address: US CA Livermore
  • Assignee: FORMFACTOR, INC.
  • Current Assignee: FORMFACTOR, INC.
  • Current Assignee Address: US CA Livermore
  • Main IPC: G01R1/073
  • IPC: G01R1/073
VERTICAL PROBE ARRAY ARRANGED TO PROVIDE SPACE TRANSFORMATION
Abstract:
Improved probing of closely spaced contact pads is provided by an array of vertical probes having all of the probe tips aligned along a single contact line, while the probe bases are arranged in an array having two or more rows parallel to the contact line. With this arrangement of probes, the probe base thickness can be made greater than the contact pad spacing along the contact line, thereby advantageously increasing the lateral stiffness of the probes. The probe tip thickness is less than the contact pad spacing, so probes suitable for practicing the invention have a wide base section and a narrow tip section.
Public/Granted literature
Information query
Patent Agency Ranking
0/0