发明申请
- 专利标题: INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME
- 专利标题(中): 弹性体的安装方式及其使用方法
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申请号: US13293972申请日: 2011-11-10
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公开(公告)号: US20130117986A1公开(公告)日: 2013-05-16
- 发明人: Rish Chhatre , David Schaefer , Sung Lee , Dan Haber
- 申请人: Rish Chhatre , David Schaefer , Sung Lee , Dan Haber
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 主分类号: B23P11/00
- IPC分类号: B23P11/00 ; B23P19/00
摘要:
A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.
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