Invention Application
- Patent Title: GYROSCOPE AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 陀螺仪及其制造方法
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Application No.: US13703506Application Date: 2011-01-26
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Publication No.: US20130118280A1Publication Date: 2013-05-16
- Inventor: Jianhong Mao , Fengqin Han , Deming Tang
- Applicant: Jianhong Mao , Fengqin Han , Deming Tang
- Applicant Address: CN Shanghai
- Assignee: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD
- Current Assignee: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD
- Current Assignee Address: CN Shanghai
- Priority: CN201010200715.3 20100611
- International Application: PCT/CN11/70635 WO 20110126
- Main IPC: G01C19/04
- IPC: G01C19/04

Abstract:
A gyroscope and a manufacturing method are provided. The gyroscope comprises: a substrate with a bottom driving electrode and a bottom measuring electrode, and a dielectric layer with a sealed cavity comprising: a central axis on the substrate; a support ring on the substrate rotatable around the central axis; a mass ring surrounding and having common central axis with the support ring; cantilevers connected with the support ring and the mass ring and suspend the mass ring in the cavity; elastic components among the support ring, the mass ring and two adjacent cantilevers; a top driving electrode overlaying the support ring, the mass ring, the cantilevers and the elastic components; a conductive plug connected with top driving electrode and bottom driving electrode on the elastic components. The mass ring comprises an insulation layer and a weight layer. Stability and performance of the gyroscope may be improved.
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