公开(公告)号：US09019587B2

公开(公告)日：2015-04-28

申请号：US14112211

申请日：2011-12-28

申请人： Jianhong Mao ,  Deming Tang

发明人： Jianhong Mao ,  Deming Tang

IPC分类号： G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G09G3/34 ,  B81C1/00 ,  B81B3/00

CPC分类号： G02B26/02 ,  B81B3/0021 ,  B81C1/00246 ,  G02B26/0841 ,  G09G3/3466 ,  G09G2300/0426

摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.

摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。

公开(公告)号：US08982289B2

公开(公告)日：2015-03-17

申请号：US13703198

申请日：2010-12-15

申请人： Cheng Huang ,  Lei Zhang ,  Deming Tang

发明人： Cheng Huang ,  Lei Zhang ,  Deming Tang

IPC分类号： G02F1/1335 ,  G03B21/20 ,  G02B27/26 ,  G02B27/28 ,  G03B21/14 ,  H04N9/31 ,  H04N13/04 ,  G02F1/13

CPC分类号： G03B21/2073 ,  G02B27/26 ,  G02B27/283 ,  G02F1/1313 ,  G03B21/14 ,  H04N9/3167 ,  H04N9/3197 ,  H04N13/337 ,  H04N13/346 ,  H04N13/363

摘要： A projection display device includes a first display panel (23a), a second display panel (23b), a PBS (Polarization Beam Splitter) (22) with a first surface (22a) and a second surface (22b) opposite each other, a light recycling device (25a, 25b and 23b), and a projection lens (24). The PBS (22) transmits a first type parallel polarized light and reflects a second type parallel polarized light. The light recycling device (25a, 25b and 23b) transforms the first type parallel polarized light transmitted by the PBS (22) into the second type parallel polarized light which carries a second image information, then reversely transmits the second type parallel polarized light to the second surface (22b) of the PBS (22). The projection display device improves the light utilization efficiency and can be used for 3D display.

摘要翻译： 投影显示装置包括第一显示面板（23a），第二显示面板（23b），具有第一表面（22a）的PBS（极化分束器）（22）和彼此相对的第二表面（22b） 光回收装置（25a，25b和23b）和投影透镜（24）。 PBS（22）透射第一类型的平行偏振光并反射第二类型的平行偏振光。 光回收装置（25a，25b和23b）将由PBS（22）透射的第一类型的平行偏振光变换为携带第二图像信息的第二类型的平行偏振光，然后将第二类型的平行偏振光反向传输到 PBS（22）的第二表面（22b）。 投影显示装置提高光的利用效率，可以用于3D显示。

公开(公告)号：US20130240962A1

公开(公告)日：2013-09-19

申请号：US13836346

申请日：2013-03-15

申请人： Lexvu Opto Microelectronics Technology (Shanghai) Ltd

发明人： Zhiwei Wang ,  Jianhong Mao ,  Fengqin Han ,  Lei Zhang ,  Deming Tang

IPC分类号： H01L31/02

CPC分类号： H01L31/02002 ,  H01L27/14627 ,  H01L27/1463 ,  H01L27/14632 ,  H01L27/14643 ,  H01L27/14665

摘要： A photosensitive imaging device and a method for forming a semiconductor device are provided. The method includes: providing a first device layer formed on a first substrate, wherein a conductive top bonding pad layer is formed on the first device layer; providing a continuous second device layer formed on a second substrate, wherein a continuous conductive adhesion layer is formed on the continuous second device layer; bonding the first device layer with the second device layer, where the top bonding pad layer on the first device layer is directly connected with the conductive continuous adhesion layer on the continuous second device layer; removing the second substrate; selectively etching the continuous second device and the continuous conductive adhesion layer to form a groove array; and filling up the groove array with an insulation material to form a plurality of second devices. Alignment accuracy may be improved.

摘要翻译： 提供了一种光敏成像装置和用于形成半导体器件的方法。 该方法包括：提供形成在第一衬底上的第一器件层，其中在第一器件层上形成导电顶焊接层; 提供形成在第二基板上的连续的第二器件层，其中在所述连续的第二器件层上形成连续的导电粘附层; 将第一器件层与第二器件层接合，其中第一器件层上的顶部焊盘层与连续的第二器件层上的导电连续粘合层直接连接; 去除所述第二基板; 选择性地蚀刻连续的第二器件和连续导电粘合层以形成凹槽阵列; 并用绝缘材料填充凹槽阵列以形成多个第二装置。 可以提高对准精度。

公开(公告)号：US20130200957A1

公开(公告)日：2013-08-08

申请号：US13701653

申请日：2010-12-13

申请人： Jianhong Mao

发明人： Jianhong Mao

IPC分类号： B81C1/00 ,  B81B3/00

CPC分类号： B81C1/0019 ,  B81B3/0018 ,  B81B3/0021 ,  B81B7/0077 ,  B81C1/0023 ,  H01L41/053 ,  H01L41/27 ,  H03B5/30 ,  H03H3/0072 ,  H03H3/02 ,  H03H9/1014 ,  H03H9/1057 ,  H03H9/17 ,  H03H9/173 ,  Y10T29/42

摘要： A crystal oscillator and manufacturing method thereof are provided. The crystal oscillator includes: a semiconductor substrate; an interlayer dielectric layer located on the surface of the semiconductor substrate, an excitation plate and a positive electrode plug and a negative electrode plug being formed inside the interlayer dielectric layer, and the positive electrode plug and the negative electrode plug being located at the both sides of the excitation plate; a bottom cavity on top of the excitation plate, located between the positive electrode plug and the negative electrode plug; a vibrating crystal located on the surface of the interlayer dielectric layer, across the bottom cavity and connected with the positive electrode plug and the negative plug, wherein the vibrating crystal connects the positive electrode plug and the negative electrode plug at its both sides and besides the other both sides are the free ends and do not contact with the surrounding objects; an isolating layer located on top of the interlayer dielectric layer, a gap between the isolating layer and the vibrating crystal thus forming a top cavity; a covering layer formed on the surface of the isolating layer. The crystal oscillator is manufactured based on Complementary Metal-Oxide-Semiconductor Transistor (CMOS) technology, and can be integrated into the semiconductor chip easily and can meet the requirement for the miniature components.

摘要翻译： 提供了一种晶体振荡器及其制造方法。 晶体振荡器包括：半导体衬底; 位于半导体衬底的表面上的层间电介质层，形成在层间电介质层的内侧的激励板和正极插头和负极插头，正极插头和负极插头位于两侧 的激励板; 位于激励板顶部的位于正电极插头和负电极插头之间的底腔; 位于层间电介质层的表面上的振动晶体穿过底部腔并与正极塞和负极连接，其中振动晶体在其两侧连接正电极插塞和负极插头，此外， 其他两边都是自由端，不要与周围的物体接触; 位于层间电介质层顶部的绝缘层，隔离层和振动晶体之间的间隙，从而形成顶部空腔; 形成在隔离层的表面上的覆盖层。 晶体振荡器基于互补金属氧化物半导体晶体管（CMOS）技术制造，可以轻松集成到半导体芯片中，可满足微型器件的要求。

公开(公告)号：US20130129118A1

公开(公告)日：2013-05-23

申请号：US13810698

申请日：2011-01-26

申请人： Jianhong Mao ,  Deming Tang

发明人： Jianhong Mao ,  Deming Tang

IPC分类号： H04R9/08 ,  H04R31/00

CPC分类号： H04R9/08 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

摘要： A micro-electro-mechanical microphone and manufacturing method thereof are provided in the invention. The micro-electro-mechanical microphone comprises: a diaphragm, which is formed on a surface of one side of a semiconductor substrate, exposed to the outside surroundings, and can vibrate freely by sensing the pressure generated by sound waves; an electrode plate with air holes, which is under the diaphragm; an isolation structure for fixing the diaphragm and the electrode plate; an air gap cavity between the diaphragm and the electrode plate, and a back cavity under the electrode plate and in the semiconductor substrate; a second cavity formed on the surface of the same side of the semiconductor substrate and in an open manner; the air gap cavity is connected with the back cavity through the air holes of the electrode plate; the back cavity is connected with the second cavity through an air groove formed in the semiconductor substrate. The micro-electro-mechanical microphone in the invention is formed on the surface of one side of the semiconductor substrate, and the manufacturing method thereof is compatible with CMOS technics, therefore the device is easy to be miniaturized and integrated into a semiconductor chip.

摘要翻译： 本发明提供一种微机电麦克风及其制造方法。 微机电麦克风包括：隔膜，其形成在半导体衬底的一侧的表面上，暴露于外部环境，并且可以通过感测由声波产生的压力而自由地振动; 在隔膜下方具有气孔的电极板; 用于固定隔膜和电极板的隔离结构; 隔膜和电极板之间的气隙腔，以及电极板下方和半导体衬底中的后腔; 第二腔，形成在半导体衬底的同一侧的表面上并以开放的方式形成; 气隙腔通过电极板的气孔与后腔相连; 后腔通过形成在半导体衬底中的空气槽与第二腔连接。 本发明的微机电麦克风形成在半导体基板的一侧的表面上，其制造方法与CMOS技术相兼容，因此该器件易于小型化并集成到半导体芯片中。

公开(公告)号：US20130118280A1

公开(公告)日：2013-05-16

申请号：US13703506

申请日：2011-01-26

申请人： Jianhong Mao ,  Fengqin Han ,  Deming Tang

发明人： Jianhong Mao ,  Fengqin Han ,  Deming Tang

IPC分类号： G01C19/04

CPC分类号： G01C19/04 ,  G01C19/5712 ,  Y10T74/1282 ,  Y10T74/1296

摘要： A gyroscope and a manufacturing method are provided. The gyroscope comprises: a substrate with a bottom driving electrode and a bottom measuring electrode, and a dielectric layer with a sealed cavity comprising: a central axis on the substrate; a support ring on the substrate rotatable around the central axis; a mass ring surrounding and having common central axis with the support ring; cantilevers connected with the support ring and the mass ring and suspend the mass ring in the cavity; elastic components among the support ring, the mass ring and two adjacent cantilevers; a top driving electrode overlaying the support ring, the mass ring, the cantilevers and the elastic components; a conductive plug connected with top driving electrode and bottom driving electrode on the elastic components. The mass ring comprises an insulation layer and a weight layer. Stability and performance of the gyroscope may be improved.

摘要翻译： 提供了陀螺仪和制造方法。 陀螺仪包括：具有底部驱动电极和底部测量电极的基底，以及具有密封腔的电介质层，包括：基底上的中心轴线; 所述基板上的支撑环可绕所述中心轴线旋转; 围绕并具有与支承环共同的中心轴的质量环; 悬臂与支撑环和质量环连接并将质量环悬挂在腔中; 支撑环之间的弹性组件，质量环和两个相邻的悬臂; 覆盖支撑环的顶部驱动电极，质量环，悬臂和弹性部件; 与弹性部件上的顶部驱动电极和底部驱动电极连接的导电插头。 质量环包括绝缘层和重量层。 可以提高陀螺仪的稳定性和性能。

公开(公告)号：US20130094803A1

公开(公告)日：2013-04-18

申请号：US13704917

申请日：2011-01-26

申请人： Jianhong Mao

发明人： Jianhong Mao

IPC分类号： G02B6/35

CPC分类号： G02B6/3506 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/3566 ,  G02B6/357

摘要： An optical path switch and an optical router are provided. The optical path switch comprises an input optical path (100), two output optical paths (201, 202), and an optical path switching element (300). The optical path switching element selectively routes the beam from the input optical path to one of the output optical paths. The optical path switching element comprises a semiconductor substrate (301), an inter-layer dielectric layer (307) on the surface of the semiconductor substrate, a cavity (302) disposed in the inter-layer dielectric layer, and an elastic light guiding plate (306) disposed in the cavity. One end of the cavity is connected with the input optical path, and the other end is separated into an upper cavity (304) and a lower cavity (305) by an isolating layer (303).

摘要翻译： 提供光路交换机和光路由器。 光路开关包括输入光路（100），两个输出光路（201,202）和光路切换元件（300）。 光路开关元件选择性地将光束从输入光路路由到输出光路之一。 光路开关元件包括半导体衬底（301），在半导体衬底的表面上的层间电介质层（307），设置在层间电介质层中的空腔（302）和弹性导光板 （306）。 空腔的一端与输入光路连接，另一端通过隔离层（303）分离成上腔（304）和下腔（305）。

公开(公告)号：US09068899B2

公开(公告)日：2015-06-30

申请号：US13905881

申请日：2013-05-30

申请人： Lexvu Opto Microelectronics Technology (Shanghai) Ltd.

发明人： Zhiwei Wang ,  Jianhong Mao ,  Lei Zhang ,  Deming Tang

IPC分类号： G01L9/12 ,  G01L9/00

CPC分类号： G01L9/12 ,  G01L9/0045 ,  G01L9/0073

摘要： The present invention relates to a pressure sensor, which may include a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, to constitute a second capacitor; and the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor, and can move along a direction perpendicular to the substrate.

摘要翻译： 压力传感器技术领域本发明涉及压力传感器，其可以包括依次层叠在基板上的第一电极板，第二电极板，第三电极板，第四电极板和第五电极板，其中，第一电极板 所述第三电极板和所述第四电极板固定在所述基板上，所述第一电极板和所述第二电极板彼此相对设置，并且在其间形成间隙，所述第二电极板悬挂在所述第一电极板上， 构成第一电容器; 第二电极板和第三电极板彼此相对设置，并且在其间形成间隙，以构成第二电容器; 并且第五电极板悬挂在第四电极板上以构成第三电容器，并且可以沿着与基板垂直的方向移动。

公开(公告)号：US08854712B2

公开(公告)日：2014-10-07

申请号：US14112165

申请日：2011-12-29

申请人： Jianhong Mao ,  Deming Tang

发明人： Jianhong Mao ,  Deming Tang

IPC分类号： G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B26/04 ,  G09G3/34 ,  H04M1/00 ,  H01L29/66

CPC分类号： G02B26/02 ,  G02B26/04 ,  G02B26/0841 ,  G09G3/34 ,  G09G3/3433 ,  H01L29/66742 ,  H04M1/00

摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.

摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。

公开(公告)号：US20140267979A1

公开(公告)日：2014-09-18

申请号：US13840200

申请日：2013-03-15

申请人： LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD.

发明人： Jianhong MAO ,  Deming TANG

IPC分类号： G02F1/1335

CPC分类号： G02F1/133536 ,  G02B26/0833 ,  G02F1/133602 ,  G02F1/13362 ,  G02F2001/133548 ,  G02F2001/133557 ,  G02F2001/133565

摘要： A panel display device is provided, which includes: a transparent back panel having a first surface and a second surface, where the first surface is adapted for reflecting incident lights from the outside, and the second surface is adapted for transmitting lights from the outside; a backlight source, disposed at one side of the second surface of the transparent back panel, which is adapted for emitting lights to the transparent back panel; a polarized grating, disposed at one side of the first surface of the transparent back panel, which includes a plurality of grating strips with gaps formed between neighbouring grating strips, where the polarized grating enables the incident lights from the transparent back panel to be polarized and then pass through the gaps; a semiconductor switch array; and a transmission light valve array. The panel display device of the disclosure increase the utilization efficiency of lights.

摘要翻译： 提供了一种面板显示装置，其包括：具有第一表面和第二表面的透明后面板，其中所述第一表面适于反射来自外部的入射光，并且所述第二表面适于从外部发射光; 背光源，设置在透明后面板的第二表面的一侧，其适于将光发射到透明后面板; 偏振光栅，设置在透明后面板的第一表面的一侧，其包括在相邻光栅条之间形成间隙的多个光栅条，其中偏振光栅使来自透明后面板的入射光偏振， 然后通过差距; 半导体开关阵列; 和透射光阀阵列。 本发明的面板显示装置提高了灯的利用效率。