Invention Application
US20130120485A1 LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM 审中-公开
液体应用装​​置,液体应用方法和纳米印刷系统

LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM
Abstract:
A liquid application device includes: a liquid ejection head including: nozzles configured to perform ejection of droplets of liquid toward a substrate; and liquid chambers connected respectively to the nozzles and defined by side walls, at least respective parts of the side walls being constituted of piezoelectric elements, the liquid ejection head being configured to cause shear deformation of the piezoelectric elements to eject the droplets of the liquid in the liquid chamber through the nozzles; and a droplet ejection control device configured to group the nozzles into groups of not less than three in such a manner that adjacent nozzles belong to different groups, and is configured to control operation of the piezoelectric elements in such a manner that the droplet ejection is performed at a same timing only through the nozzles belonging to a same group so as to deposit the liquid discretely onto the substrate.
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