LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM
    5.
    发明申请
    LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM 审中-公开
    液体应用装​​置,液体应用方法和纳米印刷系统

    公开(公告)号:US20130120485A1

    公开(公告)日:2013-05-16

    申请号:US13730476

    申请日:2012-12-28

    Abstract: A liquid application device includes: a liquid ejection head including: nozzles configured to perform ejection of droplets of liquid toward a substrate; and liquid chambers connected respectively to the nozzles and defined by side walls, at least respective parts of the side walls being constituted of piezoelectric elements, the liquid ejection head being configured to cause shear deformation of the piezoelectric elements to eject the droplets of the liquid in the liquid chamber through the nozzles; and a droplet ejection control device configured to group the nozzles into groups of not less than three in such a manner that adjacent nozzles belong to different groups, and is configured to control operation of the piezoelectric elements in such a manner that the droplet ejection is performed at a same timing only through the nozzles belonging to a same group so as to deposit the liquid discretely onto the substrate.

    Abstract translation: 液体施加装置包括:液体喷射头,包括:喷嘴,被配置为执行朝向基板的液滴喷射; 以及分别连接到所述喷嘴并由侧壁限定的液体室,所述侧壁的至少相应部分由压电元件构成,所述液体喷射头构造成使得所述压电元件的剪切变形将所述液体的液滴喷出 液体腔通过喷嘴; 以及液滴喷射控制装置,其被配置为以相邻喷嘴属于不同组的方式将喷嘴分组成不小于3的组,并且被配置为以这样的方式控制压电元件的操作,使得执行液滴喷射 在相同的时刻,仅通过属于同一组的喷嘴,以便将液体离散地沉积在基板上。

    Liquid application device, liquid application method, and nanoimprint system
    9.
    发明授权
    Liquid application device, liquid application method, and nanoimprint system 有权
    液体应用装​​置,液体应用方法和纳米压印系统

    公开(公告)号:US08894187B2

    公开(公告)日:2014-11-25

    申请号:US13730578

    申请日:2012-12-28

    CPC classification number: B41J2/14209 B82Y10/00 B82Y40/00 G03F7/0002

    Abstract: A liquid application device includes: a liquid discharge head having a structure in which nozzles for performing droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and serve to pressurize the liquid in the liquid chambers; a relative movement unit for causing relative movement between the substrate and the liquid discharge head; and a droplet ejection control unit for operating the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and controlling operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head.

    Abstract translation: 液体施加装置包括:液体排出头,其具有这样的结构,其中用于将功能液体的液滴喷射到基板上的喷嘴在预定方向上排成一行,并且包括分别连接到喷嘴的液体室和压电元件, 相应于液体室设置并用于对液体室中的液体加压; 相对移动单元,用于引起所述基板和所述液体排出头之间的相对移动; 以及液滴喷射控制单元,用于操作压电元件以使液体离散地落在基板上,并且根据与喷液头的结构对应地分组喷嘴形成的每个组,控制压电元件的操作 。

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