发明申请
- 专利标题: ENDPOINT DETERMINATION FOR CAPILLARY-ASSISTED FLOW CONTROL
- 专利标题(中): 毛细管理流量控制的终点确定
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申请号: US13704612申请日: 2011-06-18
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公开(公告)号: US20130125999A1公开(公告)日: 2013-05-23
- 发明人: Joseph D. Sweeney , Anthony M. Avila , Michael J. Wodjenski , Joseph R. Despres , Thomas H. Baum
- 申请人: Joseph D. Sweeney , Anthony M. Avila , Michael J. Wodjenski , Joseph R. Despres , Thomas H. Baum
- 申请人地址: US CT Danbury
- 专利权人: ADVANCED TECHNOLOGY MATERIALS, INC.
- 当前专利权人: ADVANCED TECHNOLOGY MATERIALS, INC.
- 当前专利权人地址: US CT Danbury
- 国际申请: PCT/US11/41013 WO 20110618
- 主分类号: F17D3/00
- IPC分类号: F17D3/00
摘要:
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.
公开/授权文献
- US09109755B2 Endpoint determination for capillary-assisted flow control 公开/授权日:2015-08-18