Invention Application
- Patent Title: LOADING ELEMENT OF A FILM BULK ACOUSTIC RESONATOR
- Patent Title (中): 电影大音量谐振器的装载元件
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Application No.: US13323285Application Date: 2011-12-12
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Publication No.: US20130147319A1Publication Date: 2013-06-13
- Inventor: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- Applicant: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L21/50 ; H01L21/66
Abstract:
Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.
Public/Granted literature
- US08910355B2 Method of manufacturing a film bulk acoustic resonator with a loading element Public/Granted day:2014-12-16
Information query
IPC分类:
