- 专利标题： INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- 专利标题（中）： 内圈保持环和外保持架
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申请号： US13762963申请日： 2013-02-08
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公开(公告)号： US20130149942A1公开(公告)日： 2013-06-13
- 发明人: Hung Chih Chen , Samuel Chu-Chiang Hsu , Yin Yuan , Huanbo Zhang , Gautam Shashank Dandavate
- 申请人： Hung Chih Chen , Samuel Chu-Chiang Hsu , Yin Yuan , Huanbo Zhang , Gautam Shashank Dandavate
- 主分类号： B24B41/06
- IPC分类号： B24B41/06
摘要：
An inner ring for a carrier head has an inner surface configured to circumferentially surround the edge of a substrate positioned on the substrate mounting surface, an outer surface, and a lower surface to contact a polishing pad. An outer ring for a carrier head has an inner surface circumferentially surrounding the inner ring, an outer surface, and a lower surface to contact the polishing pad.
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