发明申请
- 专利标题： CHEMICAL BATH DEPOSITION (CBD) APPARATUS
- 专利标题（中）： 化学浴室沉积（CBD）设备
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申请号： US13452933申请日： 2012-04-23
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公开(公告)号： US20130152856A1公开(公告)日： 2013-06-20
- 发明人: Wei-Tse Hsu , Tung-Po Hsieh , Song-Yeu Tsai
- 申请人： Wei-Tse Hsu , Tung-Po Hsieh , Song-Yeu Tsai
- 申请人地址： TW Hsinchu
- 专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址： TW Hsinchu
- 优先权： TW100146215 20111214
- 主分类号： B05C3/02
- IPC分类号： B05C3/02 ; B05C3/04 ; B05B1/00
摘要：
A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.
公开/授权文献
- US09249507B2 Chemical bath deposition (CBD) apparatus 公开/授权日：2016-02-02
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