发明申请
- 专利标题: DETERMINING ALIGNMENT USING A SPATIALLY VARYING CHARGE DISTRIBUTION
- 专利标题(中): 使用空间变化的充电分配来确定对齐
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申请号: US13326301申请日: 2011-12-14
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公开(公告)号: US20130154608A1公开(公告)日: 2013-06-20
- 发明人: Alex Chow , Robert J. Drost , Ronald Ho , Robert D. Hopkins , Ivan E. Sutherland
- 申请人: Alex Chow , Robert J. Drost , Ronald Ho , Robert D. Hopkins , Ivan E. Sutherland
- 申请人地址: US CA Redwood Shores
- 专利权人: ORACLE INTERNATIONAL CORPORATION
- 当前专利权人: ORACLE INTERNATIONAL CORPORATION
- 当前专利权人地址: US CA Redwood Shores
- 主分类号: G01N27/00
- IPC分类号: G01N27/00 ; H01L23/58
摘要:
A semiconductor die is described. This semiconductor die includes a driver, and a spatial alignment transducer that is electrically coupled to the driver and which is proximate to a surface of the semiconductor die. The driver establishes a spatially varying electric charge distribution in at least one direction in the spatial alignment transducer, thereby facilitating determination of a spatial alignment in more than one direction between the semiconductor die and another semiconductor die. In particular, a spatial alignment sensor proximate to the surface of the other semiconductor die may detect an electrical field (or an associated electrostatic potential) associated with the spatially varying electric charge distribution. This detected electric field may allow the vertical spacing between the surfaces of the semiconductor dies and/or an angular alignment of the semiconductor dies to be determined.
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