Invention Application
US20130156057A1 SEMICONDUCTOR LASER DEVICE AND METHOD OF FABRICATING THE SAME 有权
半导体激光器件及其制造方法

SEMICONDUCTOR LASER DEVICE AND METHOD OF FABRICATING THE SAME
Abstract:
The inventive concept provides semiconductor laser devices and methods of fabricating the same. According to the method, a silicon-crystalline germanium layer for emitting a laser may be formed in a selected region by a selective epitaxial growth (SEG) method. Thus, surface roughness of both ends of a Fabry Perot cavity formed of the silicon-crystalline germanium layer may be reduced or minimized, and a cutting process and a polishing process may be omitted in the method of fabricating the semiconductor laser device.
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