Invention Application
- Patent Title: SEMICONDUCTOR LASER DEVICE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 半导体激光器件及其制造方法
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Application No.: US13545889Application Date: 2012-07-10
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Publication No.: US20130156057A1Publication Date: 2013-06-20
- Inventor: In Gyoo KIM , Gyungock KIM , Sang Hoon KIM , JiHo JOO , Ki Seok JANG
- Applicant: In Gyoo KIM , Gyungock KIM , Sang Hoon KIM , JiHo JOO , Ki Seok JANG
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2011-0136674 20111216
- Main IPC: H01S5/028
- IPC: H01S5/028 ; H01L33/58

Abstract:
The inventive concept provides semiconductor laser devices and methods of fabricating the same. According to the method, a silicon-crystalline germanium layer for emitting a laser may be formed in a selected region by a selective epitaxial growth (SEG) method. Thus, surface roughness of both ends of a Fabry Perot cavity formed of the silicon-crystalline germanium layer may be reduced or minimized, and a cutting process and a polishing process may be omitted in the method of fabricating the semiconductor laser device.
Public/Granted literature
- US08948224B2 Semiconductor laser device and method of fabricating the same Public/Granted day:2015-02-03
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