- 专利标题: SWITCHABLE FILTERS AND DESIGN STRUCTURES
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申请号: US13342375申请日: 2012-01-03
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公开(公告)号: US20130169383A1公开(公告)日: 2013-07-04
- 发明人: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- 申请人: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H03H9/00
- IPC分类号: H03H9/00 ; H01L21/02 ; G06F17/50 ; H03H9/64 ; H03H9/54
摘要:
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
公开/授权文献
- US09048809B2 Method of manufacturing switchable filters 公开/授权日:2015-06-02
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