发明申请
US20130200525A1 VIA CONNECTION STRUCTURES, SEMICONDUCTOR DEVICES HAVING THE SAME, AND METHODS OF FABRICATING THE STRUCTURES AND DEVICES
有权
通过连接结构,具有该连接结构的半导体器件,以及制作结构和器件的方法
- 专利标题: VIA CONNECTION STRUCTURES, SEMICONDUCTOR DEVICES HAVING THE SAME, AND METHODS OF FABRICATING THE STRUCTURES AND DEVICES
- 专利标题(中): 通过连接结构,具有该连接结构的半导体器件,以及制作结构和器件的方法
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申请号: US13718580申请日: 2012-12-18
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公开(公告)号: US20130200525A1公开(公告)日: 2013-08-08
- 发明人: Ho-Jin LEE , Pil-Kyu KANG , Kyu-Ha LEE , Byung-Lyul PARK , Hyun-Soo CHUNG , Gil-Heyun CHOI
- 申请人: Ho-Jin LEE , Pil-Kyu KANG , Kyu-Ha LEE , Byung-Lyul PARK , Hyun-Soo CHUNG , Gil-Heyun CHOI
- 优先权: KR10-2012-0010983 20120202
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device including a lower layer, an insulating layer on a first side of the lower layer, an interconnection structure in the insulating layer, a via structure in the lower layer. The via structure protrudes into the insulating layer and the interconnection structure.
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