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1.VIA CONNECTION STRUCTURES, SEMICONDUCTOR DEVICES HAVING THE SAME, AND METHODS OF FABRICATING THE STRUCTURES AND DEVICES 有权
标题翻译: 通过连接结构,具有该连接结构的半导体器件,以及制作结构和器件的方法公开(公告)号:US20130200525A1
公开(公告)日:2013-08-08
申请号:US13718580
申请日:2012-12-18
申请人: Ho-Jin LEE , Pil-Kyu KANG , Kyu-Ha LEE , Byung-Lyul PARK , Hyun-Soo CHUNG , Gil-Heyun CHOI
发明人: Ho-Jin LEE , Pil-Kyu KANG , Kyu-Ha LEE , Byung-Lyul PARK , Hyun-Soo CHUNG , Gil-Heyun CHOI
IPC分类号: H01L23/48
CPC分类号: H01L23/481 , H01L21/76898 , H01L23/525 , H01L24/05 , H01L24/13 , H01L24/16 , H01L2224/02372 , H01L2224/0401 , H01L2224/05 , H01L2224/05024 , H01L2224/05027 , H01L2224/05568 , H01L2224/06181 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/16145 , H01L2924/00014 , H01L2924/13091 , H01L2924/00 , H01L2224/05552
摘要: A semiconductor device including a lower layer, an insulating layer on a first side of the lower layer, an interconnection structure in the insulating layer, a via structure in the lower layer. The via structure protrudes into the insulating layer and the interconnection structure.
摘要翻译: 一种半导体器件,包括下层,在下层的第一侧上的绝缘层,绝缘层中的互连结构,下层中的通孔结构。 通孔结构突出到绝缘层和互连结构中。