Invention Application
US20130216948A1 RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN-FORMING METHOD 有权
辐射敏感性树脂组合物和图案形成方法

RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN-FORMING METHOD
Abstract:
A radiation-sensitive resin composition for forming a resist film includes a polymer including a first structural unit represented by a formula (1) and a second structural unit represented by a formula (2). The first structural unit and the second structural unit are included in an identical polymer molecule or different polymer molecules. R1 represents a hydrogen atom or a methyl group. Q represents a divalent linking group having 1 to 4 carbon atoms. X represents a monovalent lactone group. A part or all of hydrogen atoms included in the monovalent lactone group represented by X are not substituted or substituted. R2 represents a hydrogen atom or a methyl group. Y represents a monovalent lactone group. A part or all of hydrogen atoms included in the monovalent lactone group represented by Y are not substituted or substituted.
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