Invention Application
US20130224895A1 CBD (CHEMICAL BATH DEPOSITION) FILM FORMATION APPARATUS AND METHOD FOR PRODUCING BUFFER LAYER
审中-公开
CBD（化学浴沉积）膜形成装置和生产缓冲层的方法
- Patent Title: CBD (CHEMICAL BATH DEPOSITION) FILM FORMATION APPARATUS AND METHOD FOR PRODUCING BUFFER LAYER
- Patent Title (中): CBD（化学浴沉积）膜形成装置和生产缓冲层的方法
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Application No.: US13861714Application Date: 2013-04-12
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Publication No.: US20130224895A1Publication Date: 2013-08-29
- Inventor: Tetsuo KAWANO , Hiroshi ARAI
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP229251/2010 20101012; JP229252/2010 20101012; JP229253/2010 20101012
- Main IPC: H01L31/18
- IPC: H01L31/18
Abstract:
A support-heat unit that supports and heats a substrate from the back side of the substrate, a reaction bath having an opening for supplying a CBD reaction solution for forming a film onto a front surface of the substrate, which is supported by the support-heat unit, and a reaction bath forward-backward drive unit that can press the opening onto the front surface of the substrate by moving the reaction bath toward the front surface of the substrate, which is supported by the support-heat unit, and that can detach the opening from the front surface of the substrate by moving the reaction bath away from the front surface of the substrate are provided.
Information query
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