发明申请
- 专利标题: Apparatus and Method for High Voltage MOS Transistor
- 专利标题(中): 高压MOS晶体管的装置和方法
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申请号: US13410135申请日: 2012-03-01
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公开(公告)号: US20130228873A1公开(公告)日: 2013-09-05
- 发明人: Chao-Wei Tseng , Kun-Ming Huang , Cheng-Chi Chuang , Fu-Hsiung Yang
- 申请人: Chao-Wei Tseng , Kun-Ming Huang , Cheng-Chi Chuang , Fu-Hsiung Yang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238
摘要:
A high voltage MOS transistor comprises a first drain/source region formed over a substrate, a second drain/source region formed over the substrate and a first metal layer formed over the substrate. The first metal layer comprises a first conductor coupled to the first drain/source region through a first metal plug, a second conductor coupled to the second drain/source region through a second metal plug and a plurality of floating metal rings formed between the first conductor and the second conductor. The floating metal rings help to improve the breakdown voltage of the high voltage MOS transistor.
公开/授权文献
- US08766357B2 Apparatus and method for high voltage MOS transistor 公开/授权日:2014-07-01
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