发明申请
- 专利标题： Method of Fabricating Optical Devices Using Laser Treatment
- 专利标题（中）： 使用激光治疗制造光器件的方法
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申请号： US12942817申请日： 2010-11-09
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公开(公告)号： US20130234111A1公开(公告)日： 2013-09-12
- 发明人: Nicholas J. Pfister , James W. Raring , Mathew Schmidt
- 申请人： Nicholas J. Pfister , James W. Raring , Mathew Schmidt
- 申请人地址： US CA Goleta
- 专利权人： Soraa, Inc.
- 当前专利权人： Soraa, Inc.
- 当前专利权人地址： US CA Goleta
- 主分类号： H01L29/20
- IPC分类号： H01L29/20 ; H01L33/06
摘要：
A method for forming optical devices. The method includes providing a gallium nitride substrate member having a crystalline surface region and a backside region. The method also includes subjecting the backside region to a laser scribing process to form a plurality of scribe regions on the backside region and forming a metallization material overlying the backside region including the plurality of scribe regions. The method removes at least one optical device using at least one of the scribe regions.
公开/授权文献
- US09048170B2 Method of fabricating optical devices using laser treatment 公开/授权日：2015-06-02
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