- 专利标题: PRESSURE SENSOR AND MICROPHONE
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申请号: US13730016申请日: 2012-12-28
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公开(公告)号: US20130255393A1公开(公告)日: 2013-10-03
- 发明人: Hideaki Fukuzawa , Akihiko Enamito , Osamu Nishimura , Michiko Hara , Hiromi Yuasa , Yoshihiko Fuji , Masayuki Kii , Eizo Fujisawa
- 申请人: Hideaki Fukuzawa , Akihiko Enamito , Osamu Nishimura , Michiko Hara , Hiromi Yuasa , Yoshihiko Fuji , Masayuki Kii , Eizo Fujisawa
- 优先权: JP2012-078361 20120329
- 主分类号: G01L1/12
- IPC分类号: G01L1/12
摘要:
According to one embodiment, a pressure sensor includes a base, and a first sensor unit. The first sensor unit includes a first transducer thin film, a first strain sensing device and a second strain sensing device. The first strain sensing device includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and the second magnetic layers. The second strain sensing device is provided apart from the first strain sensing device on the first membrane surface and provided at a location different from a location of the barycenter, the second strain sensing device including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer provided between the third and the fourth magnetic layers, the first and the second intermediate layers being nonmagnetic. The first and the second strain sensing devices, and the barycenter are in a straight line.
公开/授权文献
- US08973446B2 Pressure sensor and microphone 公开/授权日:2015-03-10