- 专利标题: Fin Structure for a FinFET Device
-
申请号: US13431727申请日: 2012-03-27
-
公开(公告)号: US20130256759A1公开(公告)日: 2013-10-03
- 发明人: Georgios Vellianitis , Mark van Dal , Blandine Duriez , Richard Oxland
- 申请人: Georgios Vellianitis , Mark van Dal , Blandine Duriez , Richard Oxland
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L21/20 ; H01L27/088 ; H01L29/02 ; H01L29/165
摘要:
A fin structure for a fin field effect transistor (FinFET) device is provided. The device includes a substrate, a first semiconductor material disposed on the substrate, a shallow trench isolation (STI) region disposed over the substrate and formed on opposing sides of the first semiconductor material, and a second semiconductor material forming a first fin and a second fin disposed on the STI region, the first fin spaced apart from the second fin by a width of the first semiconductor material. The fin structure may be used to generate the FinFET device by forming a gate layer formed over the first fin, a top surface of the first semiconductor material disposed between the first and second fins, and the second fin.
公开/授权文献
信息查询
IPC分类: