发明申请
US20130256825A1 INTEGRATED CIRCUIT COMPRISING A GAS SENSOR 有权
包含气体传感器的集成电路

  • 专利标题: INTEGRATED CIRCUIT COMPRISING A GAS SENSOR
  • 专利标题(中): 包含气体传感器的集成电路
  • 申请号: US13852978
    申请日: 2013-03-28
  • 公开(公告)号: US20130256825A1
    公开(公告)日: 2013-10-03
  • 发明人: Aurelie HUMBERTRoel DAAMENViet Hoang NGUYEN
  • 申请人: NXP B.V.
  • 申请人地址: NL Eindhoven
  • 专利权人: NXP B.V.
  • 当前专利权人: NXP B.V.
  • 当前专利权人地址: NL Eindhoven
  • 优先权: EP12162383.9 20120330
  • 主分类号: H01L27/16
  • IPC分类号: H01L27/16 H01L37/00
INTEGRATED CIRCUIT COMPRISING A GAS SENSOR
摘要:
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.
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