发明申请
- 专利标题: INTEGRATED CIRCUIT COMPRISING A GAS SENSOR
- 专利标题(中): 包含气体传感器的集成电路
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申请号: US13852978申请日: 2013-03-28
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公开(公告)号: US20130256825A1公开(公告)日: 2013-10-03
- 发明人: Aurelie HUMBERT , Roel DAAMEN , Viet Hoang NGUYEN
- 申请人: NXP B.V.
- 申请人地址: NL Eindhoven
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: NL Eindhoven
- 优先权: EP12162383.9 20120330
- 主分类号: H01L27/16
- IPC分类号: H01L27/16 ; H01L37/00
摘要:
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.
公开/授权文献
- US09263500B2 Integrated circuit comprising a gas sensor 公开/授权日:2016-02-16
信息查询
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