A task of the invention is to provide a method for producing a thin film actuator which is advantageous not only in that the thin film actuator can be largely changed in shape and easily controlled in the magnitude and direction of the change of shape, but also in that the thin film actuator is suppressed with respect to the deterioration of performance caused due to the use of the actuator, and the task is achieved by a method for producing a thin film actuator, which comprises fixing a stacked thin film having a resin thin film and a shape memory alloy thin film stacked on one another to a shaping die member, and heating and maintaining the stacked thin film in a state in which the resultant shape of the stacked thin film is restrained to cause only the resin thin film to suffer predetermined creep deformation.