发明申请
- 专利标题: Integrated Thermal Solutions for Packaging Integrated Circuits
- 专利标题(中): 封装集成电路的集成热解决方案
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申请号: US13444662申请日: 2012-04-11
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公开(公告)号: US20130273694A1公开(公告)日: 2013-10-17
- 发明人: Cheng-Chieh Hsieh , Shang-Yun Hou , Shin-Pun Jeng
- 申请人: Cheng-Chieh Hsieh , Shang-Yun Hou , Shin-Pun Jeng
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/822
- IPC分类号: H01L21/822
摘要:
A method includes attaching a wafer on a carrier through an adhesive, and forming trenches in the carrier to convert the carrier into a heat sink. The heat sink, the carrier, and the adhesive are sawed into a plurality of packages.
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