发明申请
US20130273717A1 Apparatus and Method for the Singulation of a Semiconductor Wafer 审中-公开
用于单晶半导体晶片的装置和方法

Apparatus and Method for the Singulation of a Semiconductor Wafer
摘要:
The present disclosure is directed to an apparatus for the singulation of a semiconductor substrate or wafer. In some embodiments the singulation apparatus comprises a plurality of cutting devices. The cutting devices are configured to form multiple concurrent cutting lines in parallel on a surface of the semiconductor wafer. In some embodiments, the singulation apparatus comprises at least two dicing saws or laser modules. The disclosed singulation apparatus can dice the semiconductor wafer into individual chips by dicing in a direction across a complete circumferential edge of the wafer, thereby decreasing process time and increasing throughput.
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