发明申请
US20130273717A1 Apparatus and Method for the Singulation of a Semiconductor Wafer
审中-公开
用于单晶半导体晶片的装置和方法
- 专利标题: Apparatus and Method for the Singulation of a Semiconductor Wafer
- 专利标题(中): 用于单晶半导体晶片的装置和方法
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申请号: US13448648申请日: 2012-04-17
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公开(公告)号: US20130273717A1公开(公告)日: 2013-10-17
- 发明人: Chien Ling Hwang , Yi-Li Hsiao , Bor-Ping Jang , Hsin-Hung Liao , Lin-Wei Wang , Chung-Shi Liu
- 申请人: Chien Ling Hwang , Yi-Li Hsiao , Bor-Ping Jang , Hsin-Hung Liao , Lin-Wei Wang , Chung-Shi Liu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; B24B7/10 ; B23K26/38 ; B26D7/01
摘要:
The present disclosure is directed to an apparatus for the singulation of a semiconductor substrate or wafer. In some embodiments the singulation apparatus comprises a plurality of cutting devices. The cutting devices are configured to form multiple concurrent cutting lines in parallel on a surface of the semiconductor wafer. In some embodiments, the singulation apparatus comprises at least two dicing saws or laser modules. The disclosed singulation apparatus can dice the semiconductor wafer into individual chips by dicing in a direction across a complete circumferential edge of the wafer, thereby decreasing process time and increasing throughput.
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