发明申请
- 专利标题： DEPOSITION DEVICE, AND COLLECTION DEVICE
- 专利标题（中）： 沉积装置和收集装置
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申请号： US13976443申请日： 2011-12-20
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公开(公告)号： US20130276701A1公开(公告)日： 2013-10-24
- 发明人: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- 申请人： Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- 申请人地址： JP Osaka
- 专利权人： Sharp Kabushiki Kaisha
- 当前专利权人： Sharp Kabushiki Kaisha
- 当前专利权人地址： JP Osaka
- 优先权： JP201029199 20101227
- 国际申请： PCT/JP2011/079445 WO 20111220
- 主分类号： H01L31/18
- IPC分类号： H01L31/18
摘要：
A Film (7) is provided on at least a part of a surface of each of a vapor deposition preventing plate (3) and a shutter (4) of a vacuum chamber (5) on which surface vapor deposition particles are vapor-deposited, the film (7) being provided so as to be peeled off from the each of the vapor deposition preventing plate (3) and the shutter (4), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film (7) is made.
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