Invention Application
- Patent Title: LASER CRYSTALLIZATION APPARATUS AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR ARRAY PANEL USING THE SAME
- Patent Title (中): 激光结晶装置及使用其制造薄膜晶体管阵列的方法
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Application No.: US13761276Application Date: 2013-02-07
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Publication No.: US20130280895A1Publication Date: 2013-10-24
- Inventor: Byoung-Kwon CHOO , Cheol-Ho PARK , Kwon-Hyung LEE , Sung-Chul PYO
- Applicant: Byoung-Kwon CHOO , Cheol-Ho PARK , Kwon-Hyung LEE , Sung-Chul PYO
- Priority: KR10-2012-0042651 20120424
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02
Abstract:
Laser crystallization equipment includes a laser generator generating a laser beam, the laser beam being directed toward a processing target substrate, and a blade member over the processing target substrate, the blade member being configured to chop the laser beam with a predetermined width in two directions, wherein two ends of the laser beam chopped by the blade member are irradiated to the processing target substrate as diffraction light.
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