发明申请
- 专利标题: MICROELECTROMECHANICAL SYSTEMS DEVICES AND METHODS FOR THE FABRICATION THEREOF
- 专利标题(中): 微电子系统装置及其制造方法
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申请号: US13458950申请日: 2012-04-27
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公开(公告)号: US20130283913A1公开(公告)日: 2013-10-31
- 发明人: Yizhen Lin , Sung Jin Jo , Lisa Z. Zhang
- 申请人: Yizhen Lin , Sung Jin Jo , Lisa Z. Zhang
- 申请人地址: US TX Austin
- 专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人地址: US TX Austin
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; H01S4/00 ; G01P15/00
摘要:
Embodiments of compact micro-electro-mechanical systems (MEMS) devices are provided, as are embodiments of methods for fabricating MEMS devices. In one embodiment, the MEMS device includes a substrate, a movable structure resiliently coupled to the substrate, and an anchored structure fixedly coupled to the substrate. The movable structure includes a first plurality of movable fingers, and a second plurality of movable fingers electrically isolated from and interspersed with the first plurality of movable fingers. The anchored structure includes fixed fingers interspersed with first and second pluralities of movable fingers in a capacitor-forming relationship. First and second interconnects are electrically coupled to the first and second pluralities of movable fingers, respectively.
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