公开(公告)号：US09003886B2

公开(公告)日：2015-04-14

申请号：US13458950

申请日：2012-04-27

申请人： Yizhen Lin ,  Sung Jin Jo ,  Lisa Z. Zhang

发明人： Yizhen Lin ,  Sung Jin Jo ,  Lisa Z. Zhang

IPC分类号： G01P15/125 ,  G01C19/56 ,  G01P15/08

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10T29/49002

摘要： Embodiments of compact micro-electro-mechanical systems (MEMS) devices are provided, as are embodiments of methods for fabricating MEMS devices. In one embodiment, the MEMS device includes a substrate, a movable structure resiliently coupled to the substrate, and an anchored structure fixedly coupled to the substrate. The movable structure includes a first plurality of movable fingers, and a second plurality of movable fingers electrically isolated from and interspersed with the first plurality of movable fingers. The anchored structure includes fixed fingers interspersed with first and second pluralities of movable fingers in a capacitor-forming relationship. First and second interconnects are electrically coupled to the first and second pluralities of movable fingers, respectively.

摘要翻译： 提供紧凑型微机电系统（MEMS）装置的实施例，如制造MEMS器件的方法的实施例。 在一个实施例中，MEMS器件包括衬底，弹性地耦合到衬底的可移动结构以及固定地耦合到衬底的锚定结构。 可移动结构包括第一多个可动指状物，以及与第一多个活动指状物电隔离并与之分散的第二多个可移动指状物。 锚固结构包括以电容器形成关系散布有第一和第二多个可动指状物的固定指状物。 第一和第二互连分别电耦合到第一和第二多个可动指状物。

公开(公告)号：US20130283913A1

公开(公告)日：2013-10-31

申请号：US13458950

申请日：2012-04-27

申请人： Yizhen Lin ,  Sung Jin Jo ,  Lisa Z. Zhang

发明人： Yizhen Lin ,  Sung Jin Jo ,  Lisa Z. Zhang

IPC分类号： G01P15/125 ,  H01S4/00 ,  G01P15/00

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10T29/49002

摘要： Embodiments of compact micro-electro-mechanical systems (MEMS) devices are provided, as are embodiments of methods for fabricating MEMS devices. In one embodiment, the MEMS device includes a substrate, a movable structure resiliently coupled to the substrate, and an anchored structure fixedly coupled to the substrate. The movable structure includes a first plurality of movable fingers, and a second plurality of movable fingers electrically isolated from and interspersed with the first plurality of movable fingers. The anchored structure includes fixed fingers interspersed with first and second pluralities of movable fingers in a capacitor-forming relationship. First and second interconnects are electrically coupled to the first and second pluralities of movable fingers, respectively.

摘要翻译： 提供紧凑型微机电系统（MEMS）装置的实施例，如制造MEMS器件的方法的实施例。 在一个实施例中，MEMS器件包括衬底，弹性地耦合到衬底的可移动结构以及固定地耦合到衬底的锚定结构。 可移动结构包括第一多个可动指状物，以及与第一多个活动指状物电隔离并与之分散的第二多个可移动指状物。 锚固结构包括以电容器形成关系散布有第一和第二多个可动指状物的固定指状物。 第一和第二互连分别电耦合到第一和第二多个可动指状物。

公开(公告)号：US07969167B2

公开(公告)日：2011-06-28

申请号：US12360934

申请日：2009-01-28

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： G01R27/26

CPC分类号： G01P15/125 ,  G01D5/24

摘要： A capacitance-to-voltage interface circuit includes a capacitive sensing circuit, an amplification circuit adapted for selective coupling to the capacitive sensing circuit, a capacitor bank comprising a plurality of binary-weighted capacitors, and a switching architecture associated with the capacitive sensing circuit, the amplification circuit, and the capacitor bank. The switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases, including an amplification phase and an analog-to-digital conversion phase. During the amplification phase, the capacitor bank is utilized for offsetting capacitance of the amplification circuit. During the analog-to-digital conversion phase, the capacitor bank is utilized in a successive approximation register.

摘要翻译： 电容 - 电压接口电路包括电容感测电路，适于选择性地耦合到电容感测电路的放大电路，包括多个二进制加权电容器的电容器组以及与电容感测电路相关联的开关结构， 放大电路和电容器组。 开关架构重新配置了电容 - 电压接口电路，用于在多个不同的相位中工作，包括放大相位和模 - 数转换阶段。 在放大阶段期间，电容器组用于抵消放大电路的电容。 在模数转换阶段期间，电容器组用于逐次逼近寄存器。

公开(公告)号：US06744264B2

公开(公告)日：2004-06-01

申请号：US10133701

申请日：2002-04-25

申请人： Bishnu P. Gogoi ,  Sung Jin Jo

发明人： Bishnu P. Gogoi ,  Sung Jin Jo

IPC分类号： G01R2726

CPC分类号： G01R31/2829 ,  G01D5/2405 ,  G01D21/00

摘要： A MEMS sensor packaged with an integrated circuit includes switches and control circuitry. In a test mode, the control circuitry causes the switches to turn off and on such that the first and second capacitance of the MEMS sensor can be monitored individually. During a normal mode of operation, the switches are maintained such that the MEMS sensor packaged with the integrated circuit operates to produce a filtered and trimmed output reflecting the sensed phenomena.

摘要翻译： 与集成电路一起封装的MEMS传感器包括开关和控制电路。 在测试模式中，控制电路使开关断开和接通，使得MEMS传感器的第一和第二电容可以被单独监测。 在正常操作模式期间，保持开关，使得与集成电路封装的MEMS传感器工作，以产生反映感测到的现象的滤波和修整的输出。

公开(公告)号：US20120105079A1

公开(公告)日：2012-05-03

申请号：US13344415

申请日：2012-01-05

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： G01R27/26

CPC分类号： G01R27/2605 ,  G01D5/24 ,  G01P15/125

摘要： A capacitance-to-voltage interface circuit is utilized to obtain a voltage corresponding to a detected capacitance differential, which may be associated with the operation of a capacitive sensing cell. The interface circuit includes a capacitive sensing cell, an operational amplifier adapted for selective coupling to the capacitive sensing cell, a feedback capacitor for the operational amplifier, a load capacitor for the operational amplifier, and a switching architecture associated with the capacitive sensing cell, the operational amplifier, the feedback capacitor, and the load capacitor. During use, the switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases. The different operational phases enable the single operational amplifier to be used for both capacitance-to-voltage conversion and voltage amplification.

摘要翻译： 利用电容 - 电压接口电路来获得对应于检测到的电容差的电压，其可以与电容式感测单元的操作相关联。 接口电路包括电容式感测单元，适用于选择性地耦合到电容式感测单元的运算放大器，用于运算放大器的反馈电容器，用于运算放大器的负载电容器以及与电容式感测单元相关联的开关结构， 运算放大器，反馈电容和负载电容。 在使用期间，开关结构重新配置电容 - 电压接口电路，以在多个不同的相中操作。 不同的操作阶段使单个运算放大器能够用于电容 - 电压转换和电压放大。

公开(公告)号：US20100188105A1

公开(公告)日：2010-07-29

申请号：US12360932

申请日：2009-01-28

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： G01R27/26

CPC分类号： G01R27/2605 ,  G01D5/24 ,  G01P15/125

摘要： A capacitance-to-voltage interface circuit is utilized to obtain a voltage corresponding to a detected capacitance differential, which may be associated with the operation of a capacitive sensing cell. The interface circuit includes a capacitive sensing cell, an operational amplifier adapted for selective coupling to the capacitive sensing cell, a feedback capacitor for the operational amplifier, a load capacitor for the operational amplifier, and a switching architecture associated with the capacitive sensing cell, the operational amplifier, the feedback capacitor, and the load capacitor. During use, the switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases. The different operational phases enable the single operational amplifier to be used for both capacitance-to-voltage conversion and voltage amplification.

摘要翻译： 利用电容 - 电压接口电路来获得对应于检测到的电容差的电压，其可以与电容式感测单元的操作相关联。 接口电路包括电容式感测单元，适用于选择性地耦合到电容式感测单元的运算放大器，用于运算放大器的反馈电容器，用于运算放大器的负载电容器以及与电容式感测单元相关联的开关结构， 运算放大器，反馈电容和负载电容。 在使用期间，开关结构重新配置电容 - 电压接口电路，以在多个不同的相中操作。 不同的操作阶段使单个运算放大器能够用于电容 - 电压转换和电压放大。

公开(公告)号：US08766650B2

公开(公告)日：2014-07-01

申请号：US13344415

申请日：2012-01-05

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： G01R27/26

CPC分类号： G01R27/2605 ,  G01D5/24 ,  G01P15/125

摘要： A capacitance-to-voltage interface circuit is utilized to obtain a voltage corresponding to a detected capacitance differential, which may be associated with the operation of a capacitive sensing cell. The interface circuit includes a capacitive sensing cell, an operational amplifier adapted for selective coupling to the capacitive sensing cell, a feedback capacitor for the operational amplifier, a load capacitor for the operational amplifier, and a switching architecture associated with the capacitive sensing cell, the operational amplifier, the feedback capacitor, and the load capacitor. During use, the switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases. The different operational phases enable the single operational amplifier to be used for both capacitance-to-voltage conversion and voltage amplification.

摘要翻译： 利用电容 - 电压接口电路来获得对应于检测到的电容差的电压，其可以与电容式感测单元的操作相关联。 接口电路包括电容式感测单元，适用于选择性地耦合到电容式感测单元的运算放大器，用于运算放大器的反馈电容器，用于运算放大器的负载电容器以及与电容式感测单元相关联的开关结构， 运算放大器，反馈电容和负载电容。 在使用期间，开关结构重新配置电容 - 电压接口电路，以在多个不同的相中操作。 不同的操作阶段使单个运算放大器能够用于电容 - 电压转换和电压放大。

公开(公告)号：US08125231B2

公开(公告)日：2012-02-28

申请号：US12360932

申请日：2009-01-28

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： G01R27/26

CPC分类号： G01R27/2605 ,  G01D5/24 ,  G01P15/125

摘要： A capacitance-to-voltage interface circuit is utilized to obtain a voltage corresponding to a detected capacitance differential, which may be associated with the operation of a capacitive sensing cell. The interface circuit includes a capacitive sensing cell, an operational amplifier adapted for selective coupling to the capacitive sensing cell, a feedback capacitor for the operational amplifier, a load capacitor for the operational amplifier, and a switching architecture associated with the capacitive sensing cell, the operational amplifier, the feedback capacitor, and the load capacitor. During use, the switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases. The different operational phases enable the single operational amplifier to be used for both capacitance-to-voltage conversion and voltage amplification.

摘要翻译： 利用电容 - 电压接口电路来获得对应于检测到的电容差的电压，其可以与电容式感测单元的操作相关联。 接口电路包括电容式感测单元，适用于选择性地耦合到电容式感测单元的运算放大器，用于运算放大器的反馈电容器，用于运算放大器的负载电容器以及与电容式感测单元相关联的开关结构， 运算放大器，反馈电容和负载电容。 在使用期间，开关结构重新配置电容 - 电压接口电路，以在多个不同的相中操作。 不同的操作阶段使单个运算放大器能够用于电容 - 电压转换和电压放大。

公开(公告)号：US07796079B2

公开(公告)日：2010-09-14

申请号：US12360933

申请日：2009-01-28

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： H03M1/12

CPC分类号： H03M1/466

摘要： The analog-to-digital converter provided herein includes a capacitor bank comprising a plurality of binary-weighted capacitors, an operational amplifier having an inverting input node, a noninverting input node coupled to analog ground, and an output node, a reset switch, and an input switch. The reset switch is located between the capacitor bank and the operational amplifier, and it selectively couples the capacitor bank to the inverting input node. The input switch has its common terminal coupled to the capacitor bank, and the input switch selectively couples the capacitor bank to either an analog input voltage, a floating terminal, or analog ground. The capacitor bank includes N binary-weighted capacitors and one balancing capacitor that has a unit capacitance. During operation, the analog-to-digital converter generates an N-bit digital output and one polarity bit from the analog input voltage.

摘要翻译： 本文提供的模数转换器包括电容器组，其包括多个二进制加权电容器，具有反相输入节点的运算放大器，耦合到模拟地的非反相输入节点，以及输出节点，复位开关和 输入开关。 复位开关位于电容器组和运算放大器之间，并将电容器组选择性地耦合到反相输入节点。 输入开关具有耦合到电容器组的公共端子，并且输入开关选择性地将电容器组耦合到模拟输入电压，浮动端子或模拟地。 电容器组包括N个二进制加权电容器和一个具有单位电容的平衡电容器。 在运行期间，模数转换器从模拟输入电压产生一个N位数字输出和一个极性位。

公开(公告)号：US20100188278A1

公开(公告)日：2010-07-29

申请号：US12360933

申请日：2009-01-28

申请人： Ashish Khanna ,  Sung Jin Jo

发明人： Ashish Khanna ,  Sung Jin Jo

IPC分类号： H03M1/12

CPC分类号： H03M1/466

摘要： The analog-to-digital converter provided herein includes a capacitor bank comprising a plurality of binary-weighted capacitors, an operational amplifier having an inverting input node, a noninverting input node coupled to analog ground, and an output node, a reset switch, and an input switch. The reset switch is located between the capacitor bank and the operational amplifier, and it selectively couples the capacitor bank to the inverting input node. The input switch has its common terminal coupled to the capacitor bank, and the input switch selectively couples the capacitor bank to either an analog input voltage, a floating terminal, or analog ground. The capacitor bank includes N binary-weighted capacitors and one balacing capacitor that has a unit capacitance. During operation, the analog-to-digital converter generates an N-bit digital output and one polarity bit from the analog input voltage.

摘要翻译： 本文提供的模数转换器包括电容器组，其包括多个二进制加权电容器，具有反相输入节点的运算放大器，耦合到模拟地的非反相输入节点，以及输出节点，复位开关和 输入开关。 复位开关位于电容器组和运算放大器之间，并将电容器组选择性地耦合到反相输入节点。 输入开关具有耦合到电容器组的公共端子，并且输入开关选择性地将电容器组耦合到模拟输入电压，浮动端子或模拟地。 电容器组包括N个二进制加权电容器和一个具有单位电容的平衡电容器。 在运行期间，模数转换器从模拟输入电压产生一个N位数字输出和一个极性位。