发明申请
- 专利标题: Apparatus and Method for Reducing Cross Talk in Image Sensors
- 专利标题(中): 减少图像传感器交叉的装置和方法
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申请号: US13458827申请日: 2012-04-27
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公开(公告)号: US20130285181A1公开(公告)日: 2013-10-31
- 发明人: Jeng-Shyan Lin , Dun-Nian Yaung , Jen-Cheng Liu , Tzu-Hsuan Hsu , Shuang-Ji Tsai , Min-Feng Kao
- 申请人: Jeng-Shyan Lin , Dun-Nian Yaung , Jen-Cheng Liu , Tzu-Hsuan Hsu , Shuang-Ji Tsai , Min-Feng Kao
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
A method for reducing cross talk in image sensors comprises providing a backside illuminated image sensor wafer, forming an isolation region in the backside illuminated image sensor wafer, wherein the isolation region encloses a photo active region, forming an opening in the isolation region from a backside of the backside illuminated image sensor wafer and covering an upper terminal of the opening with a dielectric material to form an air gap embedded in the isolation region of the backside illuminated image sensor wafer.