发明申请
- 专利标题： Thin Film with Reduced Stress Anisotropy
- 专利标题（中）： 具有降低应力各向异性的薄膜
-
申请号： US13460290申请日： 2012-04-30
-
公开(公告)号： US20130288078A1公开(公告)日： 2013-10-31
- 发明人: Meng Zhu , Eliot Lewis Cuthbert Estrine , Wei Tian , Venkateswara Inturi , Michael C. Kautzky
- 申请人： Meng Zhu , Eliot Lewis Cuthbert Estrine , Wei Tian , Venkateswara Inturi , Michael C. Kautzky
- 申请人地址： US CA Cupertino
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Cupertino
- 主分类号： G11B5/66
- IPC分类号： G11B5/66 ; G11B5/735 ; B05D1/38 ; B05D3/00 ; B05D3/02
摘要：
An apparatus and associated method may provide a magnetic element can have a thin film deposited on a cryogenic substrate. The thin film can additionally be stress tuned ,during primary annealing to reduce unwanted stress anisotropy. The thin film can be configured to have near zero internal stress after the primary annealing.
信息查询
IPC分类:
