Invention Application
US20130288179A1 RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND 有权
辐射敏感性树脂组合物和化合物

  • Patent Title: RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND
  • Patent Title (中): 辐射敏感性树脂组合物和化合物
  • Application No.: US13929357
    Application Date: 2013-06-27
  • Publication No.: US20130288179A1
    Publication Date: 2013-10-31
  • Inventor: Kazuo NAKAHARAKen MARUYAMA
  • Applicant: JSR CORPORATION
  • Priority: JP2010-293362 20101228
  • Main IPC: G03F7/004
  • IPC: G03F7/004
RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND
Abstract:
A radiation-sensitive resin composition includes a compound represented by a formula (1), and a polymer that includes a structural unit having an acid-labile group. R1 and R4 each independently represent a hydrogen atom, or the like. R2 and R3 each independently represent a hydrogen atom or the like. X1 and X2 each independently represent a hydrogen atom, or the like, or X1 and X2 taken together represent —S—, —O—, —SO2—, or the like. A represents an ethanediyl group, wherein at least one hydrogen atom included in X1, X2 and A is substituted by —Y—SO3−M+. Y represents an alkanediyl group having 1 to 10 carbon atoms, or the like. M+ represents a monovalent onium cation. In the case where —Y—SO3−M+ is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M+s are each identical or different.
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