发明申请
US20130323879A1 COATING METHOD, AND METHOD OF FORMING ORGANIC LAYER USING THE SAME
审中-公开
涂覆方法和使用该方法形成有机层的方法
- 专利标题： COATING METHOD, AND METHOD OF FORMING ORGANIC LAYER USING THE SAME
- 专利标题（中）： 涂覆方法和使用该方法形成有机层的方法
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申请号： US13961111申请日： 2013-08-07
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公开(公告)号： US20130323879A1公开(公告)日： 2013-12-05
- 发明人: Jin-Han PARK , Myeng-Woo NAM , Eui-Shin SHIN , Sung-Gon KIM
- 申请人： Jin-Han PARK , Myeng-Woo NAM , Eui-Shin SHIN , Sung-Gon KIM
- 优先权： KR10-2009-0102879 20091028
- 主分类号： H01L51/00
- IPC分类号： H01L51/00
摘要：
A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.
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