发明申请
US20130327147A1 Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method
审中-公开
用于测量加速度,压力等的微机械装置和相应的方法
- 专利标题: Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method
- 专利标题(中): 用于测量加速度,压力等的微机械装置和相应的方法
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申请号: US13880388申请日: 2011-09-19
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公开(公告)号: US20130327147A1公开(公告)日: 2013-12-12
- 发明人: Ando Feyh , Christina Leinenbach , Axel Franke , Gary O'Brien
- 申请人: Ando Feyh , Christina Leinenbach , Axel Franke , Gary O'Brien
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102010042687.3 20101020
- 国际申请: PCT/EP2011/066209 WO 20110919
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least one ground electrode, which is arranged on the seismic mass, and resetting means for returning the seismic mass into an initial position, wherein the fixed electrode and the ground electrode are configured in one measurement plane for measuring an acceleration, a pressure or the like in the measurement plane, and wherein the fixed electrode and the ground electrode are configured for measuring an acceleration, pressure or the like acting on the seismic mass perpendicular to the measurement plane. The disclosure likewise relates to a corresponding method and a corresponding use.
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