发明申请
US20130327147A1 Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method 审中-公开
用于测量加速度,压力等的微机械装置和相应的方法

Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method
摘要:
A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least one ground electrode, which is arranged on the seismic mass, and resetting means for returning the seismic mass into an initial position, wherein the fixed electrode and the ground electrode are configured in one measurement plane for measuring an acceleration, a pressure or the like in the measurement plane, and wherein the fixed electrode and the ground electrode are configured for measuring an acceleration, pressure or the like acting on the seismic mass perpendicular to the measurement plane. The disclosure likewise relates to a corresponding method and a corresponding use.
信息查询
0/0