Invention Application
- Patent Title: MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE
- Patent Title (中): 带有纹理膜的多层车载头
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Application No.: US13908774Application Date: 2013-06-03
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Publication No.: US20130334752A1Publication Date: 2013-12-19
- Inventor: Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
- Applicant: Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
- Main IPC: B24B37/30
- IPC: B24B37/30
Abstract:
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Public/Granted literature
- US08808062B2 Multi-chamber carrier head with a textured membrane Public/Granted day:2014-08-19
Information query
