Invention Application
US20140036345A1 FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
有权
用于轻型调制的浮动式MEMS器件的制造
- Patent Title: FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
- Patent Title (中): 用于轻型调制的浮动式MEMS器件的制造
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Application No.: US13941851Application Date: 2013-07-15
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Publication No.: US20140036345A1Publication Date: 2014-02-06
- Inventor: Charles Gordon SMITH , Richard L. KNIPE
- Applicant: CAVENDISH KINETICS INC.
- Applicant Address: US CA San Jose
- Assignee: CAVENDISH KINETICS INC.
- Current Assignee: CAVENDISH KINETICS INC.
- Current Assignee Address: US CA San Jose
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
Public/Granted literature
- US08786933B2 Fabrication of a floating rocker MEMS device for light modulation Public/Granted day:2014-07-22
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