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    MEMS RF-SWITCH WITH CONTROLLED CONTACT LANDING
    1.
    发明申请
    MEMS RF-SWITCH WITH CONTROLLED CONTACT LANDING 审中-公开

    公开(公告)号：US20180315571A1

    公开(公告)日：2018-11-01

    申请号：US15770705

    申请日：2016-11-15

    Applicant: CAVENDISH KINETICS, INC.

    Inventor： Robertus Petrus VAN KAMPEN ,  Richard L. KNIPE ,  Mickael RENAULT ,  Shibajyoti Ghosh DASTIDER ,  Jacques Marcel MUYANGO

    IPC: H01H59/00 ,  H01G5/16 ,  B81B3/00

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B3/0035 ,  B81B2201/016 ,  H01G5/16 ,  H01H2059/0018 ,  H01H2059/0072

    Abstract: A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

    DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS
    3.
    发明申请
    DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS 审中-公开
    DVC利用MEMS电阻开关和MIM电容

    公开(公告)号：US20160172112A1

    公开(公告)日：2016-06-16

    申请号：US14904855

    申请日：2014-08-01

    Applicant: CAVENDISH KINETICS, INC.

    Inventor： Richard L. KNIPE ,  Charles G. SMITH ,  Roberto GADDI ,  Robertus Petrus VAN KAMPEN

    IPC: H01G5/40 ,  H01L49/02 ,  H01G5/16

    Abstract: The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.

    Abstract translation: 本发明一般涉及利用一个或多个MIM电容器的MEMS DVC。 MIM电容器可以设置在MEMS器件和RF焊盘之间，或者MIM电容器可以集成到MEMS器件本身中。 MIM电容器确保实现了MEMS DVC的低电阻。

    FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
    5.
    发明申请
    FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION 有权
    用于轻型调制的浮动式MEMS器件的制造

    公开(公告)号：US20140036345A1

    公开(公告)日：2014-02-06

    申请号：US13941851

    申请日：2013-07-15

    Applicant: CAVENDISH KINETICS INC.

    Inventor： Charles Gordon SMITH ,  Richard L. KNIPE

    IPC: G02B26/08

    CPC classification number: G02B26/0833 ,  B81B2201/042 ,  B81C1/00317 ,  B81C2203/0136 ,  B81C2203/0145 ,  G02B26/0841

    Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

    Abstract translation: 目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。 因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以存在改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。 另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。

    MEMS LIFETIME ENHANCEMENT
    8.
    发明申请
    MEMS LIFETIME ENHANCEMENT 有权
    MEMS LIFETIME ENMANCEMENT

    公开(公告)号：US20130335878A1

    公开(公告)日：2013-12-19

    申请号：US13916675

    申请日：2013-06-13

    Applicant: CAVENDISH KINETICS INC.

    Inventor： Cong Quoc KHIEU ,  Vikram JOSHI ,  Richard L. KNIPE

    IPC: H01G5/16 ,  B81B7/02

    CPC classification number: H01G5/16 ,  B81B7/02 ,  H01G5/18 ,  H01G5/38 ,  H01H59/0009

    Abstract: The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.

    Abstract translation: 本发明一般涉及通过减少MEMS器件中的开关元件的移动次数来增加MEMS器件寿命的方法。 不是在循环之间返回到基态，如果两个循环都需要相同的电容，则开关元件可以保持在相同的状态。 例如，如果在第一和第二周期中，MEMS器件的开关元件处于高电容的状态，则开关元件可以在第一和第二周期之间保持就位而不是移动到基态。 即使电容的极性在连续的循环中不同，开关元件也可以保持在适当的位置，并且可以切换极性。 因为开关元件在周期之间保持原位，所以开关元件虽然具有相同的有限数量的运动，应该具有更长的寿命。

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