FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
    1.
    发明申请
    FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION 有权
    用于轻型调制的浮动式MEMS器件的制造

    公开(公告)号:US20140036345A1

    公开(公告)日:2014-02-06

    申请号:US13941851

    申请日:2013-07-15

    Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

    Abstract translation: 目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。 因为反射镜在连接到下面的弹簧支撑件的中间没有通孔,所以存在改善的对比度,这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支撑触点,镜子可以做得更小,从而可以用较小的像素来制作更高密度的显示器。 另外,由于没有来自任何支撑弹簧支撑件的恢复力,因为粘附,反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。

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