发明申请
- 专利标题: Transistors, Methods of Manufacture Thereof, and Image Sensor Circuits
- 专利标题(中): 晶体管,其制造方法和图像传感器电路
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申请号: US13570157申请日: 2012-08-08
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公开(公告)号: US20140042506A1公开(公告)日: 2014-02-13
- 发明人: Fredrik Ramberg , Tse-Hua Lu , Tsun-Lai Hsu , Victor Chiang Liang , Chi-Feng Huang , Yu-Lin Wei , Shu Fang Fu
- 申请人: Fredrik Ramberg , Tse-Hua Lu , Tsun-Lai Hsu , Victor Chiang Liang , Chi-Feng Huang , Yu-Lin Wei , Shu Fang Fu
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L31/08 ; H01L21/336
摘要:
Transistors, methods of manufacturing thereof, and image sensor circuits are disclosed. In one embodiment, a transistor includes a buried channel disposed in a workpiece, a gate dielectric disposed over the buried channel, and a gate layer disposed over the gate dielectric. The gate layer comprises an I shape in a top view of the transistor.
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