发明申请
- 专利标题: FIN FIELD EFFECT TRANSISTOR LAYOUT FOR STRESS OPTIMIZATION
- 专利标题(中): 用于应力优化的FIN场效应晶体管布局
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申请号: US13600369申请日: 2012-08-31
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公开(公告)号: US20140061801A1公开(公告)日: 2014-03-06
- 发明人: Gerben Doornbos , Mark van Dal
- 申请人: Gerben Doornbos , Mark van Dal
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
The present disclosure describes a layout for stress optimization. The layout includes a substrate, at least two fin field effect transistors (FinFET) cells formed in the substrate, a FinFET fin designed to cross the two FinFET cells, a plurality of gates formed on the substrate, and an isolation unit formed between the first FinFET cell and the second FinFET cell. The two FinFET cells include a first FinFET cell and a second FinFET cell. The FinFET fin includes a positive charge FinFET (Fin PFET) fin and a negative charge FinFET (Fin NFET) fin. The isolation unit isolates the first FinFET cell from the second FinFET cell without breaking the FinFET fin.
公开/授权文献
- US08766364B2 Fin field effect transistor layout for stress optimization 公开/授权日:2014-07-01
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