发明申请
- 专利标题: HIGH ASPECT RATIO SAMPLE HOLDER
- 专利标题(中): 高比例样品夹
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申请号: US13629193申请日: 2012-09-27
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公开(公告)号: US20140082920A1公开(公告)日: 2014-03-27
- 发明人: John A. Ott , Mark C. Reuter
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: B23P13/00
- IPC分类号: B23P13/00
摘要:
An elongated member is formed which has a frontal and a distal end, and a length axis. The frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle beam microscope. The elongated member includes a tubular section defining an axial cavity along the length axis, and having an orifice toward the distal end of the elongated member. The resulting device is characterized as being a sample holder for use in particle beam microscopes. The sample holder enables the examination of high aspect ratio samples by accommodating them in its axial cavity. The examination can take place without prior modification of the high aspect ratio samples.
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