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公开(公告)号：US20180269044A1
公开(公告)日：2018-09-20
申请号：US15463159
申请日：2017-03-20
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
CPC分类号： H01J37/3485 , C23C14/24 , C23C14/3414 , H01J37/32 , H01J37/3426 , H01J37/3447 , H01J2237/0203 , H01J2237/081 , H01J2237/3322
摘要： A deposition tool includes a vacuum chamber and a physical vapor deposition module including a target source in the vacuum chamber. The target source includes a target material for depositing on a workpiece. An evaporator module is independent of the physical vapor deposition module and is mounted within an enclosure in the vacuum chamber. A gate is configured to selectively open the enclosure to permit evaporation of a coating element to coat the target source in the physical vapor deposition module.
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公开(公告)号：US11299801B2
公开(公告)日：2022-04-12
申请号：US16682498
申请日：2019-11-13
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
摘要： A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.
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公开(公告)号：US08637836B1
公开(公告)日：2014-01-28
申请号：US13658733
申请日：2012-10-23
发明人： John A. Ott , Mark C. Reuter
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/2007 , Y10T29/49826 , Y10T29/49947
摘要： An elongated member is formed which has a frontal and a distal end, and a length axis. The frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle beam microscope. The elongated member includes a tubular section defining an axial cavity along the length axis, and having an orifice toward the distal end of the elongated member. The resulting device is characterized as being a sample holder for use in particle beam microscopes. The sample holder enables the examination of high aspect ratio samples by accommodating them in its axial cavity. The examination can take place without prior modification of the high aspect ratio samples.
摘要翻译： 形成具有前端和远端以及长度轴的细长构件。 前端满足用于粒子束显微镜的样品架的真空密封和机动性规格。 细长构件包括限定沿着长度轴线的轴向空腔的管状部分，并且具有朝向细长构件的远端的孔口。 所得到的装置的特征在于作为用于粒子束显微镜的样品保持器。 样品保持器可以通过将它们容纳在其轴向腔中来检查高纵横比样品。 检查可以在没有先前修改高纵横比样品的情况下进行。
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公开(公告)号：US20200080191A1
公开(公告)日：2020-03-12
申请号：US16682498
申请日：2019-11-13
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
摘要： A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.
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公开(公告)号：US10570504B2
公开(公告)日：2020-02-25
申请号：US15497841
申请日：2017-04-26
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
摘要： A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.
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公开(公告)号：US20180312959A1
公开(公告)日：2018-11-01
申请号：US15497841
申请日：2017-04-26
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
摘要： A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.
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公开(公告)号：US20180269045A1
公开(公告)日：2018-09-20
申请号：US15806454
申请日：2017-11-08
发明人： Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
CPC分类号： H01J37/3485 , C23C14/24 , C23C14/3414 , H01J37/32 , H01J37/3426 , H01J37/3447 , H01J2237/0203 , H01J2237/081 , H01J2237/3322
摘要： A deposition tool includes a vacuum chamber and a physical vapor deposition module including a target source in the vacuum chamber. The target source includes a target material for depositing on a workpiece. An evaporator module is independent of the physical vapor deposition module and is mounted within an enclosure in the vacuum chamber. A gate is configured to selectively open the enclosure to permit evaporation of a coating element to coat the target source in the physical vapor deposition module.
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公开(公告)号：US20140082920A1
公开(公告)日：2014-03-27
申请号：US13629193
申请日：2012-09-27
发明人： John A. Ott , Mark C. Reuter
IPC分类号： B23P13/00
CPC分类号： H01J37/20 , H01J2237/2007 , Y10T29/49826 , Y10T29/49947
摘要： An elongated member is formed which has a frontal and a distal end, and a length axis. The frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle beam microscope. The elongated member includes a tubular section defining an axial cavity along the length axis, and having an orifice toward the distal end of the elongated member. The resulting device is characterized as being a sample holder for use in particle beam microscopes. The sample holder enables the examination of high aspect ratio samples by accommodating them in its axial cavity. The examination can take place without prior modification of the high aspect ratio samples.
摘要翻译： 形成具有前端和远端以及长度轴的细长构件。 前端满足用于粒子束显微镜的样品架的真空密封和机动性规格。 细长构件包括限定沿着长度轴线的轴向空腔的管状部分，并且具有朝向细长构件的远端的孔口。 所得到的装置的特征在于作为用于粒子束显微镜的样品保持器。 样品保持器可以通过将它们容纳在其轴向腔中来检查高纵横比样品。 检查可以在没有先前修改高纵横比样品的情况下进行。
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