发明申请
US20140085618A1 PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
有权
使用SHOWERHEAD的附近的粒子控制和光学
- 专利标题： PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
- 专利标题（中）： 使用SHOWERHEAD的附近的粒子控制和光学
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申请号： US14033929申请日： 2013-09-23
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公开(公告)号： US20140085618A1公开(公告)日： 2014-03-27
- 发明人: Gildardo R. Delgado , Frank Chilese , Rudy Garcia , John R. Torczynski , Anthony S. Geller , Daniel J. Rader , Leonard E. Klebanoff , Michail A. Gallis
- 申请人： Gildardo R. Delgado , Frank Chilese , Rudy Garcia , John R. Torczynski , Anthony S. Geller , Daniel J. Rader , Leonard E. Klebanoff , Michail A. Gallis
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
A method and an apparatus to protect a reticle against particles and chemicals in an actinic EUV reticle inspection tool are presented. The method and apparatus utilizes a pair of porous metal diffusers in the form of showerheads to provide a continual flow of clean gas. The main showerhead bathes the reticle surface to be inspected in smoothly flowing, low pressure gas, isolating it from particles coming from surrounding volumes. The secondary showerhead faces away from the reticle and toward the EUV illumination and projection optics, supplying them with purge gas while at the same time creating a buffer zone that is kept free of any particle contamination originating from those optics.
公开/授权文献
- US09244368B2 Particle control near reticle and optics using showerhead 公开/授权日：2016-01-26
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