Invention Application
US20140090469A1 ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE
有权
加速度和角速度谐波检测集成结构及相关MEMS传感器器件
- Patent Title: ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE
- Patent Title (中): 加速度和角速度谐波检测集成结构及相关MEMS传感器器件
-
Application No.: US14032052Application Date: 2013-09-19
-
Publication No.: US20140090469A1Publication Date: 2014-04-03
- Inventor: Claudia Comi , Alberto Corigliano , Leonardo Baldasarre
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.I.
- Current Assignee: STMicroelectronics S.r.I.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITTO2012A000855 20120928
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
Public/Granted literature
- US09389077B2 Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device Public/Granted day:2016-07-12
Information query