公开(公告)号：US09354246B2

公开(公告)日：2016-05-31

申请号：US13952503

申请日：2013-07-26

Applicant: STMicroelectronics S.r.I.

Inventor： Barbara Simoni ,  Claudia Comi ,  Alberto Corigliano

IPC: G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P15/10

Abstract: A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

公开(公告)号：US20140090469A1

公开(公告)日：2014-04-03

申请号：US14032052

申请日：2013-09-19

Applicant: STMicroelectronics S.r.I.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Leonardo Baldasarre

IPC: G01C19/56

CPC classification number: G01C19/574 ,  G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0831

Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

Abstract translation: 集成的检测结构具有第一惯性质量和第二惯性质量，其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上，并且沿第一水平轴线具有直线运动，围绕第一旋转轴线旋转的第一检测运动 第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块，扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动，并且 第一个旋转轴。