ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE
    1.
    发明申请
    ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE 有权
    加速度和角速度谐波检测集成结构及相关MEMS传感器器件

    公开(公告)号:US20140090469A1

    公开(公告)日:2014-04-03

    申请号:US14032052

    申请日:2013-09-19

    Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

    Abstract translation: 集成的检测结构具有第一惯性质量和第二惯性质量,其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上,并且沿第一水平轴线具有直线运动,围绕第一旋转轴线旋转的第一检测运动 第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块,扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动,并且 第一个旋转轴。

    MEMS resonant accelerometer having improved electrical characteristics

    公开(公告)号:US09354246B2

    公开(公告)日:2016-05-31

    申请号:US13952503

    申请日:2013-07-26

    CPC classification number: G01P15/097 G01P15/10

    Abstract: A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

    PIEZOELECTRIC TRANSDUCER FOR AN ENERGY-HARVESTING SYSTEM
    3.
    发明申请
    PIEZOELECTRIC TRANSDUCER FOR AN ENERGY-HARVESTING SYSTEM 有权
    用于能量收集系统的压电传感器

    公开(公告)号:US20150035409A1

    公开(公告)日:2015-02-05

    申请号:US14446237

    申请日:2014-07-29

    CPC classification number: H02N2/186 H02N2/181 H02N2/188

    Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

    Abstract translation: 用于能量收集系统的压电换能器包括相对于第一磁性元件移动的基板,压电悬臂元件,第一磁性元件和第二磁性元件。 第一磁性元件耦合到压电悬臂元件。 第一磁性元件和第二磁性元件被设置为使得响应于通过相对位置的间隔在第一磁性元件和第二磁性元件之间的相对运动,第一磁性元件和第二磁性元件接近一个 另一个不直接接触,并且第一磁性元件和第二磁性元件之间的相互作用确定了在压电悬臂元件上施加力脉冲。

    PIEZOELECTRIC TRANSDUCER FOR AN ENERGY-HARVESTING SYSTEM

    公开(公告)号:US20180198383A1

    公开(公告)日:2018-07-12

    申请号:US15913590

    申请日:2018-03-06

    CPC classification number: H02N2/186 H02N2/181 H02N2/188

    Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

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