Invention Application
- Patent Title: MULTI-PHOTON EXPOSURE SYSTEM
- Patent Title (中): 多光子曝光系统
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Application No.: US14100127Application Date: 2013-12-09
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Publication No.: US20140092372A1Publication Date: 2014-04-03
- Inventor: Robert J. DeVoe , Brian J. Gates , Dean Faklis , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An exposure system includes a light source emitting a beam along an optical axis that is capable of inducing a multi-photon reaction in a resin. The exposure system further includes a resin undergoing multiphoton reaction, as well as an automated system including a monitor that measures at least one property of the beam selected from power, pulse length, shape, divergence, or position in a plane normal to the optical axis. The monitor generates at least one signal indicative of the property of the beam, and a sub-system adjusts the beam in response to the signal from the monitor.
Public/Granted literature
- US08885146B2 Multi-photon exposure system Public/Granted day:2014-11-11
Information query
IPC分类: