Invention Application
US20140096293A1 METHOD AND APPARATUS FOR INSPECTING THERMAL ASSIST TYPE MAGNETIC HEAD 审中-公开
检查热辅助型磁头的方法和装置

METHOD AND APPARATUS FOR INSPECTING THERMAL ASSIST TYPE MAGNETIC HEAD
Abstract:
To reliably detect scattered light generated in the near field light generation area in the inspection of a thermal assist type magnetic head (herein after refer to magnetic head), the present invention provides a magnetic head inspection apparatus including: a scanning probe microscope including a cantilever having a probe with a magnetic film formed on the surface of the tip; a probe unit for supplying alternating current to a terminal formed in a magnetic head element, so that the laser beam is incident on the near field light emitting part; an imaging unit for taking an image of the probe unit and the magnetic head element; a scattered light detection unit for detecting the scattered light generated from the probe present in the generation area of the near field light of the magnetic head element, through a pinhole; and a signal processing unit for inspecting the magnetic head element.
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