Invention Application
- Patent Title: METHOD AND APPARATUS FOR INSPECTING THERMAL ASSIST TYPE MAGNETIC HEAD
- Patent Title (中): 检查热辅助型磁头的方法和装置
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Application No.: US13956442Application Date: 2013-08-01
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Publication No.: US20140096293A1Publication Date: 2014-04-03
- Inventor: Yoshinori KITANO , Teruaki TOKUTOMI , Naoya SAITO , Takenori HIROSE , Kaifeng ZHANG
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2012-216337 20120928
- Main IPC: G01Q60/22
- IPC: G01Q60/22

Abstract:
To reliably detect scattered light generated in the near field light generation area in the inspection of a thermal assist type magnetic head (herein after refer to magnetic head), the present invention provides a magnetic head inspection apparatus including: a scanning probe microscope including a cantilever having a probe with a magnetic film formed on the surface of the tip; a probe unit for supplying alternating current to a terminal formed in a magnetic head element, so that the laser beam is incident on the near field light emitting part; an imaging unit for taking an image of the probe unit and the magnetic head element; a scattered light detection unit for detecting the scattered light generated from the probe present in the generation area of the near field light of the magnetic head element, through a pinhole; and a signal processing unit for inspecting the magnetic head element.
Information query