公开(公告)号：US20140092716A1

公开(公告)日：2014-04-03

申请号：US13964455

申请日：2013-08-12

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Naoya SAITO ,  Shinji HONMA ,  Teruaki TOKUTOMI ,  Yoshinori KITANO

IPC: G11B20/18

CPC classification number: G11B20/1816 ,  G01Q60/06 ,  G01Q60/22 ,  G01Q60/56 ,  G11B5/314 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/455 ,  G11B2005/0021

Abstract: An apparatus for inspecting a thermal assist type magnetic head is configured to include a scanning probe microscope unit comprising a cantilever having a probe with a magnetic film formed on the surface of a tip portion thereof; a prober unit which provides an alternating current to a terminal formed on the thermal assist type magnetic head element; a scattered light detection unit which detects scattered light generated from the probe; and a signal process unit which detects defect by using an output signal from the scanning probe microscope unit by scanning the surface of the thermal assist type magnetic head element with the probe in a state that the magnetic field is generated and the near-field light is stopped, and an output signal from the scattered light detection unit by scanning the surface with the probe while near-field light is generated and the magnetic field is off.

Abstract translation: 一种用于检查热辅助型磁头的装置被配置为包括扫描探针显微镜单元，其包括具有形成在其尖端部分的表面上的具有磁性膜的探针的悬臂; 向形成在热辅助型磁头元件上的端子提供交流电的探针单元; 散射光检测单元，其检测从探针产生的散射光; 以及信号处理单元，其通过使用来自扫描探针显微镜单元的输出信号，通过在产生磁场的状态下扫描热辅助型磁头元件的表面并且近场光为 停止，并且通过在产生近场光的同时扫描表面并且磁场断开时来自散射光检测单元的输出信号。

公开(公告)号：US20140086033A1

公开(公告)日：2014-03-27

申请号：US13967619

申请日：2013-08-15

Applicant: Hitachi High-Technologies Corporation

Inventor： Teruaki TOKUTOMI ,  Kaifeng ZHANG

IPC: G11B20/18

CPC classification number: G11B20/1816 ,  G11B5/3166 ,  G11B5/455 ,  G11B2005/0021

Abstract: In order to enable inspection of the physical shape of a near-field light emitting portion of a thermal assist type magnetic head, a thermal assist type magnetic head device is placed on a table movable in a plane, a probe fixed to a cantilever scans a plane apart at a constant distance from the surface of the sample placed on the table while moving the table in a plane, the displacement of the cantilever is detected by applying light to the scanning cantilever and detecting reflected light from the cantilever, an atomic force microscope (AFM) image of the thermal assist type magnetic head device is formed using information about the detected displacement of the cantilever and positional information about the table, and the quality of a physical shape including the size or typical dimensions of the near-field light emitting portion is determined by processing the formed AFM image.

Abstract translation: 为了能够检查热辅助型磁头的近场发光部的物理形状，将热辅助型磁头装置放置在可平面移动的工作台上，固定于悬臂的探头扫描 在平台上移动台面时与放置在台面上的样品表面保持恒定的距离，通过向扫描悬臂施加光并检测来自悬臂的反射光，原子力显微镜，检测悬臂的位移 使用关于检测到的悬臂的位移和关于桌子的位置信息的信息以及包括近场发光的尺寸或典型尺寸的物理形状的质量来形成热辅助型磁头装置的（AFM）图像 通过处理形成的AFM图像来确定部分。

公开(公告)号：US20140096293A1

公开(公告)日：2014-04-03

申请号：US13956442

申请日：2013-08-01

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yoshinori KITANO ,  Teruaki TOKUTOMI ,  Naoya SAITO ,  Takenori HIROSE ,  Kaifeng ZHANG

IPC: G01Q60/22

CPC classification number: G01Q60/22 ,  G01Q60/02 ,  G01Q60/56 ,  G11B5/455 ,  G11B2005/0021

Abstract: To reliably detect scattered light generated in the near field light generation area in the inspection of a thermal assist type magnetic head (herein after refer to magnetic head), the present invention provides a magnetic head inspection apparatus including: a scanning probe microscope including a cantilever having a probe with a magnetic film formed on the surface of the tip; a probe unit for supplying alternating current to a terminal formed in a magnetic head element, so that the laser beam is incident on the near field light emitting part; an imaging unit for taking an image of the probe unit and the magnetic head element; a scattered light detection unit for detecting the scattered light generated from the probe present in the generation area of the near field light of the magnetic head element, through a pinhole; and a signal processing unit for inspecting the magnetic head element.

Abstract translation: 本发明提供了一种磁头检查装置，包括：扫描探针显微镜，其包括悬臂梁 具有形成在尖端表面上的磁性膜的探针; 探针单元，用于向形成在磁头元件中的端子提供交流电流，使得激光束入射到近场发光部分; 用于拍摄探针单元和磁头元件的图像的成像单元; 散射光检测单元，用于通过针孔检测存在于磁头元件的近场光的产生区域中的探测器产生的散射光; 以及用于检查磁头元件的信号处理单元。

公开(公告)号：US20140090117A1

公开(公告)日：2014-03-27

申请号：US13967658

申请日：2013-08-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruaki TOKUTOMI ,  Tsuneo NAKAGOMI ,  Akira TOBITA ,  Norimitsu MATSUSITA

IPC: G11B5/455

CPC classification number: G11B5/455 ,  G11B5/3166

Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.

Abstract translation: 磁头检查方法包括以预定频率激励磁力显微镜的悬臂，悬臂在其末端设置有磁性探针，将磁性探针浮在磁头的写入头上，并且二维扫描 搜索范围，基于在二维扫描中具有悬臂的激励状态的写入头的搜索二维磁场强度来检测写入头的特定位置，设置小于搜索范围的形状检测范围 基于特定位置检测写入头的形状，并且利用悬臂的激励状态将磁性探头浮置在写入头上，通过检测写入头的检测二维磁场强度来检测写入头的形状 在二维扫描中。

公开(公告)号：US20130133444A1

公开(公告)日：2013-05-30

申请号：US13687217

申请日：2012-11-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshinori KITANO ,  Teruaki TOKUTOMI ,  Akira TOBITA

IPC: G01R33/12

CPC classification number: G01R33/1207

Abstract: There is provided a head element inspection apparatus that can adjust the position of a cantilever for a short time without using any adjusting jig in the case of replacing a cantilever. A head element inspection apparatus includes a cantilever holder that holds a cantilever, a holder base on which the cantilever holder is mounted, a Z-direction drive shaft that drives the holder base in the Z-direction, and a workpiece table that holds a head element and drives the head element in X- and Y-directions. The cantilever holder and the holder base include adjusting mechanisms (an adjusting screw and an off-center pin) that adjust the position of the cantilever in the X-direction and the Y-direction.

Abstract translation: 提供一种头元件检查装置，在更换悬臂的情况下，可以在不使用任何调节夹具的情况下短暂地调节悬臂的位置。 头元件检查装置包括：保持悬臂的悬臂支架，安装有悬臂支架的保持器基座，沿Z方向驱动保持器基座的Z方向驱动轴，以及保持头部的工件台 并且在X和Y方向上驱动头元件。 悬臂支架和支架底座包括调节悬臂在X方向和Y方向上的位置的调节机构（调节螺钉和偏心销）。

公开(公告)号：US20140092717A1

公开(公告)日：2014-04-03

申请号：US13967695

申请日：2013-08-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruaki TOKUTOMI ,  Naoya SAITO ,  Yoshinori KITANO ,  Kaifeng ZHANG ,  Masahiro WATANABE ,  Takenori HIROSE

IPC: G11B20/18

CPC classification number: G11B20/1816 ,  G01Q60/08 ,  G11B5/455 ,  G11B2005/0021

Abstract: An apparatus for inspecting a thermal assist type magnetic head is constituted by a scanning probe microscope means including a cantilever having a probe with a magnetic film formed on the surface of a tip portion thereof; a probe unit which provides an alternating current to a terminal formed on the thermal assist type magnetic head element and causes a pulse drive current or pulse drive voltage; a scattered light detection means which scans the near-field light emitting part with the probe to detect the scattered light generated from the probe in the generation region of the near-field light; an imaging means which image the thermal assist type magnetic head element; and a signal process means inspects the thermal assist type magnetic head element and an output signal outputted from the scanning probe microscope means by scanning with the probe while providing an alternating current to the terminal.

Abstract translation: 一种用于检查热辅助型磁头的装置由扫描探针显微镜装置构成，该扫描探针显微镜装置包括悬臂，该悬臂具有形成在其尖端部分的表面上的具有磁性膜的探针; 探针单元，其向形成在所述热辅助型磁头元件上的端子提供交流电流，并产生脉冲驱动电流或脉冲驱动电压; 散射光检测装置，其用探针扫描近场发光部分，以检测在近场光的发生区域中由探针产生的散射光; 成像装置，其对所述热辅助型磁头元件进行成像; 并且信号处理装置通过用探头扫描同时向终端提供交流电流来检查热辅助型磁头元件和从扫描探针显微镜装置输出的输出信号。