发明申请
US20140097342A1 ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD USING ELECTRON BEAM
有权
使用电子束的电子显微镜和图像捕获方法
- 专利标题： ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD USING ELECTRON BEAM
- 专利标题（中）： 使用电子束的电子显微镜和图像捕获方法
-
申请号： US14123744申请日： 2012-05-24
-
公开(公告)号： US20140097342A1公开(公告)日： 2014-04-10
- 发明人: Natsuki Tsuno , Hideyuki Kazumi , Yuzuru Mochizuki , Takafumi Miwa , Yoshinobu Kimura , Toshiyuki Yokosuka
- 申请人： Natsuki Tsuno , Hideyuki Kazumi , Yuzuru Mochizuki , Takafumi Miwa , Yoshinobu Kimura , Toshiyuki Yokosuka
- 优先权： JP2011-125475 20110603
- 国际申请： PCT/JP2012/063320 WO 20120524
- 主分类号： H01J37/26
- IPC分类号： H01J37/26 ; G01B15/04 ; H01J37/28
摘要：
The present invention is characterized by an electron microscope which intermittently applies an electron beam to a sample and detects a secondary electron signal, wherein an arbitrarily defined detection time (T2) shorter than the pulse width (Tp) of the applied electron beam is selected, and a secondary electron image is formed using the secondary electron signal acquired during the detection time. Consequently, it is possible to reflect necessary sample information including the internal structure and laminated interface of the sample in the contrast of an image and prevent unnecessary information from being superimposed on the image, thereby making it possible to obtain the secondary electron image with improved sample information selectivity and image quality.
公开/授权文献
信息查询
